Matatun C-Seal na Ci gaba na IGS na Sama don Tsarin Iskar Gas na Semiconductor Mai Tsarkakakken Tsarkakakke

Matatun C-Seal na IGS na Sama don Tsarin Iskar Gas na Semiconductor Mai Tsabtace Hoto da aka Fito

Takaitaccen Bayani:

Alamar kasuwanci:HENGKO

Sunan Matata:Matatar C-Seal ta Dutsen IGS

Kayan aiki:SS 316L

Yawan kwarara:10 ~ 120 SLPM

Matsakaicin zafin aiki:460° C

Girman cire ƙwayoyin cuta:> 0.003 μm

Aika mana imel Komawa Ƙananan Rukuni

Cikakken Bayani game da Samfurin

Alamun Samfura

Bayani

Matatun saman HENGKO an tsara su ne don biyan buƙatun buƙatun tsarin iskar gas da aka haɗa da ake amfani da su a cikin kayan aikin OEM na semiconductor. Suna ba da tacewa a cikin masana'antu a 0.003 µm, waɗannan matatun suna tabbatar da aiki mai kyau da aminci tare da ingancin katsewar barbashi na ≥99.9999999% (9-LRV) a 120 slpm.

An ƙera su ne daga foda mai ƙarfi na bakin ƙarfe 316L wanda aka yi wa siminti don abubuwan tacewa da kuma wurin da aka sanya su, waɗannan matatun sun dace da ƙayyadaddun bayanai na SEMI F86-0304, waɗanda ke ɗauke da sassan tashar jiragen ruwa biyu waɗanda aka tsara don tsarin rarraba iskar gas mai inci 1.125 tare da tsarin C-seal. Suna tallafawa matsakaicin matsin lamba na shiga na 3.4 MPa a 100°C da matsakaicin bambancin matsin lamba na aiki na 0.69 MPa a 100°C.

Waɗannan matatun matattara na musamman, waɗanda suka dace da ƙayyadaddun hatimin nau'in C da W, suna samun tsafta daga ƙasa tare da sakin barbashi

Tare da saman saman Ra< 1.6 µm a waje da Ra< 0.13 µm a cikin ciki, an tsara su don jure yanayin zafi mai yawa har zuwa 460°C. An ƙera su don sauƙin haɗawa da haɓaka ƙira na zamani, waɗannan matatun suna sauƙaƙa shigarwa da kulawa, suna taimakawa wajen inganta aikin tsarin a cikin isar da iskar gas ta semiconductor da aikace-aikacen sarrafawa.

Siffar Samfurin

▶ Jimillar ginin ƙarfe mai lita 316
▶ Tsarin ƙira mai sauƙi, ƙaramin tsari, mai adana sarari
▶ Kyakkyawan halaye na maye gurbin iskar gas da kuma cire iskar gas
▶ Yawan zafin jiki, matsin lamba mai yawa, da kuma juriya ga tsatsa
▶ Gidaje masu amfani da ƙarfe mai lita 316 na lantarki
▶ Shigarwa da gyarawa cikin sauƙi da inganci
▶ Hatimin injiniya, ba a haɗa shi da wani abu da aka ƙera ba

Matatun Hatimin IGS Masu Aiki Mai Kyau don Tsarin Isarwa na Iskar Gas na Semiconductor

Takardar bayanai

Sigogi na Fasaha	Ƙima
Kayan Sinadarin Tace	Foda mai tsafta ta Bakin Karfe 316L
Kayan Gidaje	Bakin Karfe 316L
Matsakaicin Matsi a Shigarwa	3.4 MPa @ 100°C
Matsakaicin Bambancin Aiki	0.69 MPa @ 100°C
Matsakaicin Zubar da Iskar Helium Ta Tabbatarwa	1x10⁻¹¹¹ cc/min
Yawan zubewar gwajin Helium	1x10⁻⁹ cc/min
Maganin Fuskar	Rawar waje< 1.6 μm
	Fuskar Cikin Gida< 0.13 μm
Matsakaicin Zafin Aiki	460°C
Ingantaccen Tsarin Haɗa Barbashi	≥99.9999999% (9-LRV) @ 120 slpm (MPPS na Tunani, duk ƙwayoyin cuta)
Tsafta a Ƙasa	Sakin Barbashi:< 0.03 barbashi/lita (< 1 barbashi/ft³)
	Masu canzawa:Danshin <10 ppb
Girman Matsewar Barbashi	≥0.003 μm
Nisa ta kwarara	0 ~ 120 slpm